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299 Analysis

299 Analysis. For exact numbers check 299step.xlsx. Summary of 299. Nb (15nm)/Al 2 O 3 (15nm;4-0nm wedge)/Co(30nm) Try to etch Nb with CF 4 Seems like 3 distinct regions of etching: Pad, Wedge, No Dielectric

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299 Analysis

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  1. 299 Analysis For exact numbers check 299step.xlsx

  2. Summary of 299 • Nb(15nm)/Al2O3(15nm;4-0nm wedge)/Co(30nm) • Try to etch Nb with CF4 • Seems like 3 distinct regions of etching: Pad, Wedge, No Dielectric • In wedge region there seems to be residue. With EDX, there seems to be excess Oxygen, Si, and Cl peaks. • No apparent etching of Nbor Co in wedge region. • Try to bake the residue off, but no effect. Could be due to higher pressure in the oven that nothing was observed.

  3. 4/29/12 EDX

  4. EDX of etch 05/01/2012

  5. Findings Wedge Region • AlO is completely etched, resolve O and Al disappearance. • Co didn’t get etched • Nb same amount, but may etched but redeposited on surface. (? Nb, NbO, NbF) • Si peak present in the etched region of the Wedge • Old Data (wide range) and New (narrow range) all line up • Al is a factor of 10 less in the shoulder than in the pad compared the etched region.

  6. AlO pad • Thick AlO on shoulder has significant counts compared to etched area. • No Si • No Co difference • Al present in shoulder region, less in the etched region. • O peak in shoulder, no O peak in etched region • No etching of Nb

  7. All Metal • No Al • No Si • No Co difference in shoulder or etched region • No detectable O in the etched area or shoulder • No difference in Nb in shoulder or etched region

  8. Questions • Nb? or NbO or NbF

  9. 299 Zygo

  10. Sample1-1a

  11. Sample 2

  12. Sample 3

  13. Sample 4

  14. Sample 5

  15. Sample 6

  16. Sample 7

  17. Sample 8

  18. Sample 9

  19. Baking Solution • Attempt to get the residue off of the surface after the bake. • Pumped oven to 100 Torr and reached a temp of 210°C • No change to step height

  20. Close to the thin edge

  21. DekTek

  22. Zygo

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