Introduction

1. Plasma Assisted Synthesis and Application ofDiamond-like Carbon FilmsThin Film Technology Research CenterKorea Institute of Science & Technology

2. Introduction • Since 1991, our group has developed world-wide core competencies in the synthesis and application technology of hard amorphous carbon films (also referred to as diamond-like carbon (DLC) films). • Using various deposition techniques ranging from r.f.-PACVD to filtered vacuum arc process, we could have investigated wide range of DLC films from soft polymeric one to very hard tetrahedral amorphous carbon. • We also developed the core technologies to control the residual stress and to improve adhesion against which are prerequisite for the application of DLC films. • Starting from DLC coated VCR head drum, four of our technologies were transferred to Korean companies and successfully commercialized.

3. (Hydrogenated) Amorphous Carbon Films Tetrahedral Amorphous Carbon Films Carbon Nanotube Nanostructured Thin Films RF-PACVD Filtered Cathodic Arc Deposition System Ion Plating Direct Ion Beam Deposition Thermal CVD Hybrid System of Above Processes Materials and Processes

4. Applications • Anti-wear Low Friction Coatings • Various Sliding Components • Diesel Engine Parts • Protective Coating for Hard Disk, etc. • DLC coated Tools and Dies • IC Packaging Tools • PCB Micro Drills, etc. • Abrasion Resistant AR coating for IR Windows • Cold Cathode using Carbon Base Materials

5. Research Interests • Synthesis and Application Technology of DLC • Process Development • Structure and Property Control by Third Element Addition • Residual Stress Control and Adhesion Improvement • Tribochemical Behavior of DLC films • Residual Stress and Mechanical Behavior of Thin Films • Synthesis of Carbon Nanotubes • Field Emission Behavior of Carbon Base Materials • Computational Simulation of Thin Films

6. 다이아몬드상 카본필름의 합성 및 응용기술 개발한국과학기술연구원박막기술연구센터

7. 소개 • 본 연구진은 1991년 이후 다이아몬드상 카본 (DLC) 필름이라고도 불리우는 경질탄소박막의 합성 및 응용기술의 개발연구를 수행하여 왔다. • 본 연구진은 r.f.-PACVD로 부터 filtered vacuum arc공정에 이르는 매우 다양한 방법의 합성기술을 이용하여, 광범위한 물성의 다이아몬드상 카본 필름의 합성거동을 연구하고 물성제어기법을 개발하고 있으며, 박막의 잔류응력 조절과 접착력 증진기술의 개발을 통해 DLC 필름의 응용을 위한 기반을 구축하고 있다. • 본 연구진은 DLC coating VCR head drum등 4건의 기술이전을 성공적으로 달성하였으며, DLC 필름의 산업응용을 위해 계속 노력하고 있다. • 본 연구진은 ERC에 참여함으로써, 고기능성 탄소계 복합 박막의 합성기술을 개발하고 이를 산업화하기 위한 연구를 추진하고자 한다.

8. (Hydrogenated) Amorphous Carbon Films Tetrahedral Amorphous Carbon Films Carbon Nanotube Nanostructured Thin Films RF-PACVD Filtered Cathodic Arc Deposition System Ion Plating Direct Ion Beam Deposition Thermal CVD Hybrid System of Above Processes 합성박막소재 및 공정기술

9. 개발응용기술 • 고윤활성 내마모 박막 • 섭동 기계부품의 고체윤활 코팅 • 디젤엔진 부품의 내마모 윤활코팅 • 차세대 하드디스크의 보호코팅, 등. • DLC 코팅 공구 및 금형 • 반도체 Packaging 공구 • PCB 가공용 마이크론 드릴, 등. • 적외선 창의 내마모성 무반사 코팅기술 • 탄소계 냉음극 개발

10. 연구 분야 • Synthesis and Application Technology of DLC • Process Development • Structure and Property Control by Third Element Addition • Residual Stress Control and Adhesion Improvement • Tribochemical Behavior of DLC films • Residual Stress and Mechanical Behavior of Thin Films • Synthesis of Carbon Nanotubes • Field Emission Behavior of Carbon Base Materials • Computational Simulation of Thin Films