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Pump vibration project

Pump vibration project. Advisor Dr. Dave Turcic. Sponsor Edwards Vacuum Ltd. Team members Duc Le Ron Pahle Thanh Nguyen Khoa Tran. The pump system from Edwards is used on Intel’s manufacturing floor. Vibrations from this system can affect the chip fabrication process.

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Pump vibration project

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  1. Pump vibration project Advisor Dr. Dave Turcic Sponsor Edwards Vacuum Ltd. Team members Duc Le Ron Pahle Thanh Nguyen Khoa Tran

  2. The pump system from Edwards is used on Intel’s manufacturing floor. • Vibrations from this system can affect the chip fabrication process Background Figure 1. A frame and pumps system from Edwards Co. Ltd.

  3. Objective • Design a system to reduce the vibration transmitted from the pump to the ground by at least 25% (measured by acceleration) • Requirements: Cost less than $1000. Require no power (passive). Work across the entire frequency range (30-105Hz) Fit within the current frame.

  4. Timeline

  5. Current status • Quantifying the problem is still in progress.Testing difficulties have setback this process. • External search and internal search is completed. • Evaluation and selection is in progress. • The team will move forward with the selection and detailed design once diagnostic testing is completed. • The project is behind schedule.

  6. Overview of concepts 1/ Spring and mass vibration isolator (2 DOF) • Pros: Availability of components • Cons: Complex analysis Model may not fully describe the real system Figure 2. Model for the current system

  7. Overview of concepts Implementation of compound mass – spring system a. Mounting on a concrete plate: • Pros: No changes to current frame Stiffness and damping can be easily adjusted • Cons:Large size Add elevation to the system Takes more time to maintain Figure 2. Concept drawing for the concrete plate solution

  8. Overview of concepts Implementation of compound mass – spring system b. Adjust mass and stiffness of the frame (i.e. Fill with concrete) • Pros: Compact size • Cons: Requires modification to the frame Figure 3. Concept drawing for the spring mounting solution

  9. Overview of concepts 2/ Filling the hollow frame with low-wave-speed media to reduce the peak acceleration amplitudes. • Pros: Aesthetic Easy to implement • Cons: Availability of materials Only applicable at high frequencies Figure 4. A steel tube filled with 3M™ Glass Bubbles K1

  10. Overview of concepts 3/ Use of viscoelastic materials to coat the frame • Viscoelastic materials can dissipate energy in the form of heat in each loading/unloading cycle • Pros: Easy to install Light weight and compact • Cons: High cost Temperature dependent Figure 5. 3M™ Damping Foil 2552

  11. Overview of concepts • Apply coating to the critical points on the frame. • Critical points are found from testing Figure 6. 3D drawing for a coated frame. Coating is shown in red.

  12. Overview of concepts 4/ Isolating the upper pump from frame Back Front

  13. Overview of concepts 4/ Isolating the upper pump from frame Back Front

  14. Evaluation and selection • The concrete base mounting method is rejected due to large size and maintenance issues. • Currently there is not enough data to choose one solution. • List of possible solutions: 1. Coating the frame with viscoelastic materials. 2. Isolating the pump from the frame. 3. Compound mass – spring isolation system.

  15. Plan for spring term • Finish diagnosis testing by March 21th • Finish detail design by April 10th • Design implementation by May 1st • Evaluation testing by May 20th • Review and improvement by May 30th

  16. Questions and Answers

  17. Preliminary testing results

  18. Published results for low-wave-speed media

  19. Picture of a pump-and-frame system

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