1. Tutorial 1 Derek Wright Wednesday, January 5th, 2005

2. This Course • The Good: • This course could be called: The “How Everything That’s Cool Works” Course • Mostly qualitative • If you get how everything works, you’ll do great • If you like to memorize how to do a certain type of problem, you might not do as well • Hopefully some good demos • Great way to decide if grad school is right for you

3. This Course • The Bad: • Relies on some stuff you haven’t been taught yet (process technology) • Have to get used to the idea that things don’t work the same at the nanometer scale • Textbook is good, but way too expensive

4. Textbook • Not recommended • $156 • Technology is changing so fast, most of this book will be obsolete in a few years • However, it’s a really cool book!

5. What is Nanotechnology? • Any technology that has at least one dimension at the nanometer scale • Quantum Wells • Giant Magnetoresistance • Carbon Nanotubes • Things that use tunneling • Atomic Force Microscopes

6. Why Use Nanotechnology? • There are two main reasons: • The small feature size allows miniaturization and high information/work density • The small feature size allows the exploitation of quantum effects

7. Examples of Information Density • Hard Drives now exploit Giant Magnetoresistance (GMR) to greatly increase density

8. Examples of Information Density • Display quality is increasing due to feature size reduction • Organic Light Emitting Diodes are a promising candidate for new displays

9. Examples of Information Density • Shrinking feature size means smaller, faster chips

10. Examples of Quantum Devices • Quantum computers exploit quantum spin states of molecules to enable bit-level parallelism

11. Examples of Quantum Devices • Quantum Wells can selectively trap electrons with quantized energy levels

12. Examples of Quantum Devices • Tunnel Diodes make use of an electron being a probability wave (Heisenberg’s Uncertainty Principle) and a highly skewed band diagram. • Negative Resistance

13. Examples of Quantum Devices • “How many electrons does it take to remember the entire contents of the Library of Congress? Only one, according to University of Michigan professor Philip Bucksbaum. Since electrons, like all elementary particles, are actually waves, Bucksbaum has found a way to phase-encode any number of ones and zeros along a single electron's continuously oscillating waveform.” – EE Times

14. Building Devices Exposure/ Developing Deposition/ Growth or Etching Photoresist Application Photoresist Etching

15. Deposition vs. Growth • Deposition: • New material is stuck on top of the substrate (e.g. Amorphous Silicon) • Growth: • A form of deposition where new material reacts with the substrate to form a compound (O2 reacts with Si substrate to form SiO2 insulator)

16. Inert material Reactive material Deposition vs. Growth Grown Material Wafer Wafer Deposited Material

17. Some Deposition Techniques • Sputter • Molecular Beam Epitaxy • Chemical Vapour Deposition • Thermal CVD • Plasma Enhanced CVD • Low Pressure CVD • Spin-on • Printing

18. Some Growth Techniques • Uses CVD to cause reactive species to hit the surface • PECVD is great because it strips electrons off gas-phase molecules and causes many reactive ions to form

19. Etching Techniques • Wet Chemical Etching • Ion Beam Etching • Reactive Ion Etching • Focused Ion Beam Etching

20. Example of RIE in DRAMs • RIE allows very high aspect ratio trenches to be created • Extremely useful for shrinking capacitor size in DRAMs

21. Course Outline • Process Technology: • Deposition • Growth • Lithogrpahy • Etching • Micromachining • Ashing • Chemo-Mechanical Polishing

22. Course Outline • Scanning Probe Techniques: • Scanning Tunnelling Microscopy • Scanning Force Microscopy • Imaging of Soft Materials • Manipulating Atoms and Molecules • Chemical Reactions with STM

23. Course Outline • Sensor Arrays and Imaging Systems: • Physical Principles of Sensors • Optical Imaging Systems • IR Imaging Systems • Electronic Nose • Tactile Sensors and Arrays

24. Course Outline • Displays: • Liquid Crystal Displays • Organic Light Emitting Diode Displays • Field Emission and Plasma Displays • Electronic Paper

25. Course Outline • Logic Devices: • Silicon MOSFETs • Ferroelectric Field Effect Transistors • Resonant Tunneling Quantum Devices • Single-Electron Devices • Carbon Nanotubes

26. Course Outline • Mass Storage Devices: • Storage Principles • Hard Disk Drives • Magneto-Optical Discs • Compact and Digital Versatile Discs • AFM-Based Mass Storage

27. Course Outline • Nano-BioSystems: • Neuro-Electronic Interfacing • Biomaterials • DNA Microarrays

28. Useful Websites • Google (duh) • ieeexplore.ieee.org • www.eetimes.com

29. Thank You! • This presentation will be available on the web.