32 nm node - PowerPoint PPT Presentation

Extreme Ultra-Violet Lithography

Extreme Ultra-Violet Lithography. Matt Smith Penn State University EE 518, Spring 2006 Instructor: Dr. J. Ruzyllo. Outline. Why do we need EUV lithography? Brief overview of current technology What exactly is EUV? System diagram Challenges associated with EUV 13.5nm source

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405 views • 16 slides

Extreme Ultra-Violet Lithography

Extreme Ultra-Violet Lithography. Outline. Why do we need EUV lithography? Brief overview of current technology What exactly is EUV? System diagram Challenges associated with EUV 13.5nm source Optics Masks Resists. Why EUV?. k 1 *λ. NA.

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568 views • 16 slides

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