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Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effe

Chapter 8 Ion implantation. Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effect of channeling. Damage caused by ion implantation. Damage repair. NE 343: Microfabrication and thin film technology

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975 views • 40 slides

Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effe

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1.44k views • 40 slides

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Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effe

Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effe