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AMC-2008 Invited Talk September 23, 2008 Andrew B. Kahng, UCSD Kambiz Samadi, UCSD

CMP Modeling and DFM. AMC-2008 Invited Talk September 23, 2008 Andrew B. Kahng, UCSD Kambiz Samadi, UCSD Rasit O. Topaloglu, AMD abk@ucsd.edu http://vlsicad.ucsd.edu. Step height. Over-removal. Puddling. Dishing. Erosion. CMP Process.

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609 views • 37 slides

Closing the Loop in Interconnect Analyses and Optimization: CMP Fill, Lithography and Timing

Closing the Loop in Interconnect Analyses and Optimization: CMP Fill, Lithography and Timing. Puneet Gupta 1 Andrew B. Kahng 1,2,3 O.S. Nakagawa 1 Kambiz Samadi 2. (1) Blaze DFM, Inc., Sunnyvale, CA. (2) ECE Department, University of California at San Diego.

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305 views • 29 slides

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Cmp fill - PowerPoint PPT Presentation

AMC-2008 Invited Talk September 23, 2008 Andrew B. Kahng, UCSD Kambiz Samadi, UCSD

Closing the Loop in Interconnect Analyses and Optimization: CMP Fill, Lithography and Timing