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Recent Development of FinFET Technology for CMOS Logic and Memory

Recent Development of FinFET Technology for CMOS Logic and Memory. Chung-Hsun Lin EECS Department University of California at Berkeley. Outline. Why FinFET FinFET process Unique features of FinFET Mobility, workfunction engineering, corne r effect , QM, volume inversion Issues

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Recent Development of FinFET Technology for CMOS Logic and Memory