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0.1um T-Gate Technology (By EBMF-10.5)

0.1um T-Gate Technology (By EBMF-10.5). Kim Dae-Hyun 2002 / 7 / 9. Problem for Conv. Gate Process. - PMMA-650K ? ??? 0.1um T-Gate ?? -. PMMA650k. SiN. Dose=3nC/cm. Dose=4nC/cm. - Under Dose Cond. for single coating. - Foot Dose ? ???? ?? ??. - But, 0.25um line definition.

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Dose 40uc cm 2 - PowerPoint PPT Presentation

0.1um T-Gate Technology (By EBMF-10.5)