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Compensation for Effects of Pitch-Split Double Exposure in Nanoscale SRAM

Compensation for Effects of Pitch-Split Double Exposure in Nanoscale SRAM. Wen Li and Matthew Weiner. Pitch Split Double Exposure (PSDE). Standard lithography Print everything on one layer using a single mask PSDE Print neighboring polysilicon lines on two different masks

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Compensation for Effects of Pitch-Split Double Exposure in Nanoscale SRAM