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Design and Simulation of a Novel MEMS Dual Axis Accelerometer

Design and Simulation of a Novel MEMS Dual Axis Accelerometer Zijun He, Advisor: Prof. Xingguo Xiong Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT 06604. Abstract. The intrinsic frequency of the device along Y-axis is.

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Design and Simulation of a Novel MEMS Dual Axis Accelerometer