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Total Dose Response of HfSiON MOS Capacitors

Total Dose Response of HfSiON MOS Capacitors. D. K. Chen, F. E. Mamouni, R. D. Schrimpf, D. M. Fleetwood, and K. F. Galloway Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, TN. G. Lucovsky and S. Lee Dept of Physics and Material Science,

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Total Dose Response of HfSiON MOS Capacitors