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Application of Vertically Integrated Electronics and Sensors (3D) to Track Triggers

Application of Vertically Integrated Electronics and Sensors (3D) to Track Triggers. Contents Overview of 3D Fermilab Developments Sensor integration using oxide bonding Tezzaron 3D Run Application to the CMS sLHC Trigger Module Conclusions. 3D Technology.

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Application of Vertically Integrated Electronics and Sensors (3D) to Track Triggers