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VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*

VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tian a ) , Mark Denning b ) , Randall Urdhal b ) and Mark J. Kushner a ) a) University of Michigan, Ann Arbor, MI 48109 USA tianpeng@umich.edu, mjkush@umich.edu

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360 views • 27 slides

VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*

VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tian a ) , Mark Denning b ) and Mark J. Kushner a ) a) University of Michigan, Ann Arbor, MI 48109 USA tianpeng@umich.edu, mjkush@umich.edu b) Agilent Technologies, 5301 Stevens Creek Blvd, Santa Clara, CA

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403 views • 26 slides

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