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COMPUTATIONAL INVESTIGATION OF DUAL-FREQUENCY POWER TRANSFER IN CAPACITIVELY COUPLED PLASMAS* Yiting Zhang and Mark J.

COMPUTATIONAL INVESTIGATION OF DUAL-FREQUENCY POWER TRANSFER IN CAPACITIVELY COUPLED PLASMAS* Yiting Zhang and Mark J. Kushner Department of Electrical and Computer Engineering, University of Michigan, Ann Arbor, 48109 (yitingz@umich.edu, mjkush@umich.edu )

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384 views • 18 slides

* Work supported by National Science Foundation and Semiconductor Research Corp.

DEVELOPMENT OF ION ENERGY ANGULAR DISTRIBUTION THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yiting Zhang a , Nathaniel Moore b , Walter Gekelman b and Mark J. Kushner a (a) Department of Electrical and Computer Engineering,

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300 views • 16 slides

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Monte carlo module n - PowerPoint PPT Presentation

COMPUTATIONAL INVESTIGATION OF DUAL-FREQUENCY POWER TRANSFER IN CAPACITIVELY COUPLED PLASMAS* Yiting Zhang and Mark J.

* Work supported by National Science Foundation and Semiconductor Research Corp.