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Kinetic Lattice Monte Carlo Simulations of Dopant Diffusion/Clustering in Silicon

Kinetic Lattice Monte Carlo Simulations of Dopant Diffusion/Clustering in Silicon. Zudian Qin and Scott T. Dunham Department of Electrical Engineering University of Washington SRC Review February 25-26,2002. Outline. Introduction to KLMC Simulations High Concentration Arsenic Diffusion

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Kinetic Lattice Monte Carlo Simulations of Dopant Diffusion/Clustering in Silicon