Neutral collisions - PowerPoint PPT Presentation

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Why plasma processing? (1)

Why plasma processing? (1). Accurate etching of fine features. UCLA. The Coburn-Winters experiment. Ion bombardment greatly enhances chemical etching. UCLA. Why plasma processing? (2). Plasma enhanced chemical vapor deposition (PECVD) Sputtering Ashing. UCLA.

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Effect of Ion-Neutral Collisions on Sheath Potential Profile

Effect of Ion-Neutral Collisions on Sheath Potential Profile. 33rd International Electric Propulsion Conference, The George Washington University, Washington, D.C ., USA October 6 – 10, 2013. Samuel J. Langendorf, Mitchell L.R. Walker

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