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Nanoimprint lithography (NIL)

Nanoimprint lithography (NIL). Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL, reverse NIL, NIL of bulk resist (polymer sheet, pellets). UV-curing NIL. Resists for UV-NIL.

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Nanoimprint lithography (NIL)