Optical proximity correction - PowerPoint PPT Presentation

ME 598 – Lecture 2 - Photolithography

Thin Films. Polish. Patterned wafer. Etch. Photo. Diffusion. Test/Sort. Implant. *. ME 598 – Lecture 2 - Photolithography. Ultraviolet Light. Chrome island on glass mask. Exposed area of photoresist. Window. photoresist. Shadow on photoresist. photoresist. oxide. oxide.

★ ★ ★ ★ ★

1.55k views • 24 slides

Effect of Resist Thickness

Effect of Resist Thickness. Resists usually do not have uniform thickness on the wafer Edge bead: The build-up of resist along the circumference of the wafer - There are edge bead removal systems Step coverage. Centrifugal Force. Effect of Resist Thickness.

★ ★ ★ ★ ★

592 views • 13 slides

View Optical proximity correction PowerPoint (PPT) presentations online in SlideServe. SlideServe has a very huge collection of Optical proximity correction PowerPoint presentations. You can view or download Optical proximity correction presentations for your school assignment or business presentation. Browse for the presentations on every topic that you want.