Resist contrast - PowerPoint PPT Presentation

Basic Resist Theory

Basic Resist Theory. Basic Resist Theory. Contents. Electron scattering in resist and substrate Proximity effect Resist interactions (positive / negative / chemically amplified resists, resist contrast) Dose definition Influence of beam energy (penetration depth)

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310 views • 24 slides

Nanolithography

Nanolithography. Lecture 15 G.J. Mankey gmankey@mint.ua.edu. Writing and Printing. To go far beyond the Raleigh limit of optical processes, other probes must be applied.

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511 views • 11 slides

Nanolithography

Nanolithography. Lecture 15 G.J. Mankey gmankey@mint.ua.edu. Writing and Printing. To go far beyond the Raleigh limit of optical processes, other probes must be applied.

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875 views • 11 slides

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