Resistive coating - PowerPoint PPT Presentation

Atomic Layer Deposition for Microchannel Plates

Atomic Layer Deposition for Microchannel Plates. Jeffrey Elam Argonne National Laboratory September 24, 2009. Atomic Layer Deposition (ALD). Layer-by-layer thin film coating method Atomic level control over thickness and composition Precise coatings on 3-D objects

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392 views • 11 slides

Atomic Layer Deposition for Microchannel Plates

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174 views • 11 slides

MCP from Glass Substrates

MCP from Glass Substrates. Jeffrey Elam Argonne National Laboratory April 14, 2009. MCP Structure. pore. resistive coating (ALD) emissive coating (ALD) conductive coating (thermal evaporation). What ALD Film for Resistive Coating?. ZnO: conductor Al 2 O 3 : insulator

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296 views • 6 slides

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