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Convenient and Reproducible Bi-layer Lift-off Procedure for Fine Patterned (7 m m/3 m m line/space) Micron-Thick Sputter

BIT' s 1st Annual World Congress of Nano- S&T A Dedicated Event for Nanoscience and Nanotechnology Professionals, Oct.23-26, 2011 Dalian, China. Convenient and Reproducible Bi-layer Lift-off Procedure for Fine Patterned (7 m m/3 m m line/space) Micron-Thick Sputtered Niobium .

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Convenient and Reproducible Bi-layer Lift-off Procedure for Fine Patterned (7 m m/3 m m line/space) Micron-Thick Sputter