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7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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576 views • 18 slides
7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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466 views • 18 slides
Surface Micromachining

Surface Micromachining

Surface Micromachining. Dr. Marc Madou, Fall 2012, UCI Class 10. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane)

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887 views • 18 slides
7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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200 views • 18 slides

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