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Model Based Double Patterning Lithography and Simulated Annealing

Model Based Double Patterning Lithography and Simulated Annealing. R. Rodrigues and S. Kundu Department of EECS University of Massachusetts at Amherst. ISQED 2011. Outline. Introduction Apply SA to DPL Optimization The Flow of the MDPL Algorithm Experimental Results Conclusions.

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Model Based Double Patterning Lithography and Simulated Annealing