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Stamp deformation during nanopattern thermal imprinting on a double-curved substrate

Stamp deformation during nanopattern thermal imprinting on a double-curved substrate. Jiri Cech a , Alexander Bruun Christiansen a , Rafael Josef Taboryski a. Results Submicron p atterns were transfered onto PMMA using PDMS stamp and onto PS using Zeonor foils. Conclusion

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Stamp deformation during nanopattern thermal imprinting on a double-curved substrate