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Chapter 5: Lithography

Chapter 5: Lithography. Introduction. The mechanism to print 2-D patterns to a thin film layer on the wafer surface. Masks are glass plates (soda lime or quartz glass) that contain the patterns. The patterns are first transferred from the mask to photoresist (PR), a light-sensitive polymer.

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Basic Concepts

Basic Concepts. Antireflective coating is used to prevent reflections from the chrome coming back into the resist Occasionally AR coatings are deposited on wafers also Develop the resist and etch to remove the metal We get good dimensional control because the Cr is very thin (~80nm)

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Typical emission spectra - PowerPoint PPT Presentation

Chapter 5: Lithography

Basic Concepts