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P. Ranade, H. Takeuchi, W.-H. Lee, V. Subramanian, and T.-J. King

Application of Silicon-Germanium in the Fabrication of Ultra-shallow Extension Junctions of Sub-100 nm PMOSFETs. P. Ranade, H. Takeuchi, W.-H. Lee, V. Subramanian, and T.-J. King IEEE Trans, Electron Devices, vol. 49, pp.1436-1443, Aug. 2002 C.-F. Huang ( ??? ) 05/26/2004. Outline.

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Ultra shallow - PowerPoint PPT Presentation

P. Ranade, H. Takeuchi, W.-H. Lee, V. Subramanian, and T.-J. King