Wafer growth - PowerPoint PPT Presentation

Lecture 2: Wafer and Epitaxy Techniques

Lecture 2: Wafer and Epitaxy Techniques. Semiconductor Substrate Production: Si, GaAs, InP , GaP, InAs, InSb……. SiC, Sapphire, GaN Wafer Growth: Czochralski Growth (CZ) Bridgman Growth of GaAs Float Zone Growth see Campbell Book pp.10-33 for (2)(3). Czochralski Growth (CZ).

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Improved Migration-Enhanced Epitaxy for Self-Aligned InGaAs Devices

Electronic Materials Conference (EMC), 6-25-2009. Improved Migration-Enhanced Epitaxy for Self-Aligned InGaAs Devices. Mark A. Wistey University of California, Santa Barbara Now at University of Notre Dame mwistey@nd.edu. P. McIntyre, B. Shin, E. Kim Stanford University

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