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Yield distribution - PowerPoint PPT Presentation

Synthesis Workshop of the Advanced Institute on Climatic Variability and Food Security Geneva, 9-10 May 2005

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Comparison between the STD and the HCl epitaxial process

Comparison between the STD and the HCl epitaxial process. G. Galvagno, F. La Via, A. Firrincieli, S. Di Franco, F. Roccaforte. OUTLINE. Drift mobility in epitaxial layer 4H-SiC (CREE) Characterization of epitaxial layers deposited by ETC ( standard process and HCl process ).

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528 views • 26 slides

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Yield distribution - PowerPoint PPT Presentation

Synthesis Workshop of the Advanced Institute on Climatic Variability and Food Security Geneva, 9-10 May 2005

Comparison between the STD and the HCl epitaxial process