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Overview of Historical Ion Beam Techniques and Their Development

This document surveys key advancements in various ion beam techniques from 1972 to 1992. It highlights significant contributions such as Aisenberg and Chabot's work on arc ion beams, Holland and Ohja's PACVD methodology, Mori and Namba's exploration of ion plating, Savvides' development of sputtering techniques, and Collins et al.'s innovations in laser ablation. Additionally, it mentions the filtered vacuum arc process, illustrating the evolution of ion beam technology and its applications in material science and engineering.

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Overview of Historical Ion Beam Techniques and Their Development

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  1. Historical Survey • 1972 • Aisenberg and Chabot : Arc Ion Beam • 1979 • Holland and Ohja : PACVD • 1984 • Mori and Namba : Ion Plating • 1986 • Savvides : Sputtering • 1992 • Collins et al : Laser Ablation • Filtered Vacuum Arc

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