1 / 14

Development of Air-Coupled Ultrasound transducer for nondestructive evaluation

Development of Air-Coupled Ultrasound transducer for nondestructive evaluation. Xuefeng Wang1, Ying Fan1, Wei-Cheng Tian1, Hyon-Jin Kwon2, Stacey Kennerly1, Glenn Claydon1, and Andrew May1 GE Global Research Center, Niskayuna, New York, USA GE Sensing, Fremont, California, USA.

tatum
Télécharger la présentation

Development of Air-Coupled Ultrasound transducer for nondestructive evaluation

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Development of Air-Coupled Ultrasound transducer for nondestructive evaluation • Xuefeng Wang1, Ying Fan1, Wei-Cheng Tian1, Hyon-Jin Kwon2, Stacey Kennerly1, Glenn Claydon1, and Andrew May1 • GE Global Research Center, Niskayuna, New York, USA • GE Sensing, Fremont, California, USA MEMS 2008, Tucson, AZ, USA, January 13-17, 2008 Teacher ： Cheng-Hsien LiuReporter：Chien Thanh Nguyen Date：2008.6.11 PME5230 Final Presentation

  2. Outline • Introduction • Ultrasound inspection • Transducer Design and Fabrication • Ultrasound transducer Function • Test Result • Conclusion PME5230 Final Presentation

  3. IntroductionNondestructive Evaluation Method Radiographic method Thermographic method Electromagnetic method Optical method Nondestructive Evaluation method Ultrasonic method PME5230 Final Presentation

  4. Ultrasound inspection Fig. Example of ultrasound Inspection Fig. Defect exist inside sample • Ultrasound inspection can be used to investigate the property of material, the thickness, defect, … • Can be apply for many field such as: composites in aircraft structure, wood materials, food and pharmacy… PME5230 Final Presentation

  5. Ultrasound inspection immersion Fig. Linear ultrasound inspection techniques PME5230 Final Presentation `

  6. Can not apply for many field Ultrasound transducer Coupling layer Coupling media • Constant coupling during entire inspection for reliable testing • Suitable acoustic matching for acoustic energy transfer • No influence on the properties of the testing object • Not toxic or corrosive • Wets both the surface of the transducer and of the sample (suitable viscosity) • Can easily be removed after inspection Capacitive micromachined ultrasound transducers (CMUTs) Piezoelectric material PME5230 Final Presentation

  7. Transducer Design A schematic of a cross-sectional view of an air-coupledCMUT. A microscope image (top view) of arrayed cells on a CMUT device. A prototype CMUT device packaged on a printed circuit board PME5230 Final Presentation

  8. Transducer Fabrication (a) Etch Si substrate (b) Grow and pattern SiO2 (c) Bond toSOI (silicon-on-insulator) wafer (d) Remove SOI handle wafer (e) Open substratecontact window and ionimplantation (f) Remove SiO2 (g) Form metal electrodes PME5230 Final Presentation

  9. Ultrasound transducer Function V V Ultrasound can function both as a transmitter and a receiver PME5230 Final Presentation

  10. Test Result Fig. A block diagram of the CMUT acoustic test setup Fig. Ultrasound signal obtained by CMUT receiver in a transmission test. A loop gain of -51 dB was calculated from the received and the input signal • AC Receiver Magnitude/ AC drive Transmitter Magnitude • Best set of commercial transducer: -65 dB loop gian. 14 dB lower than CMUTs reported here PME5230 Final Presentation

  11. Test Result • DC bias and AC operating voltages were applied to two CMUT devices • Scanning laser-Doppler vibrometer: inspect the membrane vibration • Patterned SiO2 insulation layers showed consistent and synchronized cell vibration for a long period of time • Un-patterned blanket oxide showed out-of-phase membrane vibration • The unsynchronized membrane vibration was due to charging of the SiO2 insulation layer PME5230 Final Presentation

  12. Conclusions • Ultrasound inspection method face tremendous challenges when implemented in ambient air without liquid coupling. • Capacitive micromachined ultrasound transducers for air-coupled non-contact non-destructive evaluation has been developed to gain higher transduction efficiency. • The developed devices have large gaps and patterned dielectric insulation layers to ensure high transduction efficiency without dielectric breakdown or charging failures. • Acoustic transmission test, paired transducers showed a -51dB loop gain, higher than commercial air-coupled ultrasound transducers. • CMUT may be used widely for air inspection PME5230 Final Presentation

  13. Reference • http://en.wikipedia.org/wiki/Ultrasonic_testing • Nonlinear acoustic interaction on contact interfaces and its use for nondestructive testing • D. Donskoy*, A. Sutin, A. Ekimov • Air-coupled ultrasound inspection of various materials • R. Stoessel *, N. Krohn, K. Pfleiderer, G. Busse • Air-coupled Ultrasound Inspection as a New Non-destructive • Testing Tool for Quality Assurance. • Von der Fakultat maschinenbau der University Stuttgart • Fabricating Capacitive Micromachined Ultrasonic • Transducers With Wafer-Bonding Technology • Yongli Huang, A. Sanli Ergun, Edward Hæggström, Mohammed H. • Badi, and B. T. Khuri-Yakub PME5230 Final Presentation

  14. Thank you for your attention! PME5230 Final Presentation

More Related