MSi

1. Master’s of Science in Applied PhysicsInternship in Semiconductor Industry MSi Charley Myles, Mark Holtz, and Roger Lichti Department of Physics Texas Tech University Lubbock, Texas 79409-1051

2. Lubbock Texas Tech Background • 24,000 students • Physics Department: 19 faculty. • M.S. and Ph.D. programs: • Solid State1,2 • AMO1,2 • Biophysics1,2 • Physics Education1 • Particle Physics1 • 1 Experiment, 2 Theory

3. Research & Education Initiatives • Maddox Laboratory for Semiconductor Research • www.ee.ttu.edu/MaddoxLab • M.S in Applied Physics. Program in Semiconductor Product Engineering. • www.phys.ttu.edu/MSi • www.ee.ttu.edu/PSPE • Sensor Technology Center • Funding from various individual and group grants • Three-course graduate series in MEMS • www.ee.ttu.edu/MEMS

4. Stefan Estreicher Theory of Defects in Silicon Shubhra Gangopadhyay Low and High k dielectrics Mark Holtz Optical Properties David Lamp Defect Levels Roger Lichti Muon Spin Rotation Charley Myles Bandstructure Theory Tim Dallas Nanofluidics Sergey Nikishin III-Nitrides Henryk Temkin Optoelectronics Semiconductor Research Physics EE

5. MSi Motivation • Provide excellent education and training for Texas Tech students in microelectronics. • Emphasize fundamental, analytical, and practical degree work. Interdisciplinary. • Produce strong programs, alternative to traditional M.S. and Ph.D. programs, which offer advanced training. • Not competitive with our existing M.S. and Ph.D. • Serve as national prototype for university-industry educational programs. First group of students in 1996.

6. Prior to internship (two semesters) Quantum Mechanics Semiconductor Processing Processing and Characterization Laboratory Device Physics Semiconductor Physics Computational Physics Electives base (one semester following internship) Electromagnetic Theory Statistical Mechanics Solid State Physics Advanced Semiconductor Processing Laboratory VLSI Design Failure Analysis Parametric Testing … Curriculum Year 1 Year 2 Summer & Fall Internship

7. Input • Departmental alumni. • Discussions with scientists and engineers in the microelectronics industry. • Established track record for educating physics students for careers in microelectronics. Departmental strengths emphasized!

8. MSi Internships “STRATEGY FOR IMPROVING LITHOGRAPHY LAYERS” Duke Phasirakul (1999) “MOS GATE PATTERNING USING DEEP UV STEP-AND-SCAN LITHOGRAPHY” and “PATTERN FIDELITY OPTIMIZATION IN 0.35 m OPTICAL LITHOGRAPHY” Jerome deGuzman (1998) “INLINE USE OF IN-FAB AMRAY SEM” and “THE USE OF OPTICAL PROXIMITY CORRECTION (OPC) IN RESOLVING METAL LINE PULLBACK ISSUES OF SIMICONDUCTOR LITHOGRPHY” Marvin Partin (1998) “AIRBORNE CONTAMINATION OF CHEMICALLY AMPLIFIED PHOTORESIST” Brian Weber (1998) “INTEGRATAION AND ELECTRICAL TEST” Yvonne Emil (1998) “GATE OXIDE CHARACTERIZATION FOR MOS DEVICES” Ric Justus (1997) “DEVICE MODLING OF DRAM CAPACITORS WITH TCAD SOFTWARE” and “INTERFACE EFFECTS AND IONIC CONDITION OF BARIUM TITANATE CAPACITORS” Dan Janson (1999) “INTEGRATION AND SPC IN DRAM PRODUCTION”William A. Turmel (1999) “FAILURE ANALYSIS OF MICROCONTROLLER INTEGRATED CIRCUITS” Arjang Fartash (1999) “DIAGNOSTIC MEASUREMENT BATTERY IN FA” Paul D. Gamble (2000) “THE HV5 PROCESS AND PROPERTIES OF POWER BIPOLAR TRANSISTORS” Chad E. Cox (2000)

9. MSi Internships “YIELD AND INTEGRATION IN NEXT-GENERATION INTEGRATED CIRCUITS” Kari Copeland (2001) “POLYCRYSTALLINE PEEL-BACK IN DUV LITHOGRAPHY” Jon Vanbuskirk (2001) “FAILURE ANALYSIS IN AIR-BAG SENSORS” Nasmul Ahsan (2001) “CHALLENGES IN RESOLUTION FOR MICROELECTRONICS FAILURE ANALYSIS” Nick A. Martinez (1999) “FAILURE ANYLYSIS AND MECHANICS IN INTEGRATED CIRCUITS” Jianbai Zhu (1999) “FLIP CHIP FAILURE ANALYSIS” Chris Carty (1998) “FAILURE ANALYSIS TECHNIQUE DEVELOPMENTS:LOCALIZED DELAYING AND FOCUSSED ION BEAM MICRO-MACHINING” and “INVESTIGATIONS INTO DEEP SILICON TRENCH ETCHING FOR FLIPCHIP PACKAGE FAILURE ANALYSIS” Preston Scott (1998) “PHOTOMETRIC EVALUATION OF THIN FILM OPTICAL CONSTANTS”and “MEASUREMENT OF COMPLEX REFRACTIVE INDICES” David Bessire(1997) “EFFECT OF ARRAY IMPLANT DOSE ON FLASH MEMORY PROGRAMMABILITY” Richard Lawrence (1997) “HIGH FREQUENCY MODELING OF BIPOLAR TANSISTORS” Michel Baker (1998) “INVESTIGATION OF DEFECTS FROM PLASMA OXIDE ETCHES AND PLASMA PHOTORESIST ASHERS AND CHARACTERISTIC X-RAY ANALYSIS” Jeremy O’Dell (1997)

10. INFRASTRUCTURE National Science Foundation Texas Instruments Applied Materials Texas Tech University STUDENT SUPPORT National Science Foundation Texas Tech University Texas Instruments Applied Materials Intel AMD Motorola LINKS WITH EE ... MSi ... Program Support

11. MSi - Applied Physics Texas Tech University A “Category 1” Professional M.S. according to the Nov. 2000 AIP report “Mastering Physics for Non-Academic Careers” by Stephen Norton, Philip Hammer, and Roman Czujko.

12. Future ... • Make the most of our strong relationship with EE Department and Companies: • Student support • Course offerings • Laboratories • Continue to offer students excellent career opportunities. • Attract more excellent students. • Continued research relationships with industry. • Sensor Systems Center started in 1999. • New curriculum initiatives: • NSF CRCD on MEMS and microsensors. • Ph.D. bridge programs with non-Ph.D. granting universities in Texas … Internship based.

13. Contacts MSi www.phys.ttu.edu Dr. Mark Holtz Department of Physics Texas Tech University Lubbock, TX 79409-1051 Phone: 806-742-3782 email: Mark.Holtz@ttu.edu PSPE www.ee.ttu.edu/pspe Dr. Kwong Chao Department of Electrical Engineering Texas Tech University Lubbock, TX 79409-3103 Phone: 806-742-3451 email: Kwong Chao@coe.ttu.edu