1 / 9

Fabricated Test Suite

Fabricated Test Suite. Design Deadline: 5/1. Agenda. Overview of Materials / Rules / Schedule Establish General Layout and Principles Scope of Devices to Fab Measurement Instruments Timetable. PolyMUMPS Info. We receive 15 1 cm x 1cm chips… the outside mm is unsafe?. 8 mm.

visser
Télécharger la présentation

Fabricated Test Suite

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Fabricated Test Suite Design Deadline: 5/1

  2. Agenda • Overview of Materials / Rules / Schedule • Establish General Layout and Principles • Scope of Devices to Fab • Measurement Instruments • Timetable

  3. PolyMUMPS Info

  4. We receive 15 1 cm x 1cm chips… the outside mm is unsafe? 8 mm Jason’s Constants Measurements Raffi’s SA/GA 8 mm Complex Comparison Devices Simple Comparison Devices 4000 µm x 4000 µm sub squares, but flexible to change

  5. Rough Subsquare Capacity • Sufficient distance between devices • Need contacts for electrostatics • Want things to line up, so it is possible to find the devices we’re measuring on the chip. • We can add labels • Want duplicates (5?) so we do not have to remount if one breaks. • 400 µm x 400 µm area for complex devices • Have space for approximately 100 devices / 5 == 20 unique. • 100 µm x 100 µm area for small devices • Have space for 16 * 20 = 320 unique devices.

  6. Simple Comparison Devices MF_C.m MF_Isrc.m MF_L.m MF_R.m MF_Vsrc.m MF_anchor.m MF_beam2d.m MF_beam3d.m MF_comb2d.m MF_eground.m MF_f2d.m MF_f3d.m MF_gap2d.m MF_gap2dforce.m MF_gap3dforce.m MF_opamp.m MF_pos.m MF_vcvs.m Anchor – have a few anchors (but do not want to do too many, as other people have already done extensive tests). Beams – Some simple beams at different angles and different sizes/lengths, different anchorings… as well as different actuation methods Gaps – different sizes and spacings Comb drive – different length/number/spacing of teeth Need to determine what ranges to test.

  7. Complex Comparison Devices • Beamgap • Mirror • Tang Resonator • Cantilever • Serpentine

  8. Measurement Instruments • SMIS (resolves 1 µm in-plane 30-50 nm out-plane static) • Measure surface up to 1 MHz vibrations • Can also serve as just a camera • Possibly will be able to attach probe tips • Microvision (same in-plane as SMIS… depends on magnification) • Like a probe-station camera… can produce AVI • But need a microlab account… • Also, may use Pisano’s camera in 5109 Etch. • Need to coordinate with people in 5109 • Laser Doppler Vibrometer • Measures a single point 0.5 Hz – 1.5 MHz • Also need a microlab account. • Regardless, we may want add markings in the Poly0 layer to eyeball displacements, as well as alignment markings.

  9. Timetable • Mid-late-March • Review the devices we want to include • Early April • Review layout, sanity check • End April • Finalize layout and submit

More Related