4 Operation, mechanisms and applications

1. MEMS MOEMS Nano Workshop 4 Operation, mechanisms and applications • Ken Gilleo PhD • ET-Trends LLC

2. Motion (actuators) POWER • Actuators (“motors”) • Electrical(input) • Thermal (usually from electrical) • Photonic (for MOEMS, OE) • Sensors (output); usually electrical signals • Capacitance • Piezoresistive • Resonant beam • Electron tunneling • Photonic • Chemical • Biological/biochemical Change/output is caused by mechanical motion/force TYPES

3. Actuator Classes • Electrostatic/capacitive • Linear comb drive • Rotary comb drive • Horizontal parallel plates • Electromagnetic • Linear • Rotary • Integrated coils or external field • Permanent or soft magnetic films • Thermal • Bimorph: dissimilar materials • Shape memory alloys • Pneumatic/hydraulic • Mechanical conversions/translations

4. MEMS Engines * • Electrostatic; very efficient • Thermal; easy to implement • Electromagnetic, smaller • Pneumatic • Hydraulic • Photoelectric (energy through fiber) *Surface area is relatively high, mass is very low; surface effects are important

5. Charged Charged ES Unit shuttle Anchor point Electrostatic (ES)

6. Thermal Engines (T) • Expansion • Material, external; inkjet • Bimorph beam - bending • High force, moderate displacement • Frequency limited by conductivity

7. Bimorph Beam (Thermal) off Resistive heater Low CTE on High CTE

8. Electromagnetic U of Wisconsin CalTech

9. DebiotechSTMicroelectronics insulin pump Thermal Inkjet Bellows: Air Pump MEMS Pumps • Actuation Mechanisms • Electrostatic • Thermal • Magnetic • Pneumatic • Piezoelectric • Ultrasonic • Direct Fluidic Actuation • Fluidic phase change • Electrohydrodynamic (EOF, electrophoresis, etc) • Direct fluidic actuation mechanisms

10. Sensors – the #1 Class Popular for Accelerometers, mics, more • Capacitance • Piezoresistive • Resonant beam • Electron tunneling • Photonic • Chemical • Biological/biochemical Many principles

11. ADI JPL Inertial Sensors (motion) • Accelerometers • Capacitor • Resonant • Multiple axis • Gyroscopes ADI

12. Accelerometer/Gyros • Automotive • Sensing: crash, torque, vibration (well-being) • Navigation; GPS back-up • Active suspension • Consumer • Input device; computer, games, phones • Sports training, medical therapeutic • Alarms; burglar, seismic (earthquake) • Stabilization, camera • Military • Ordnance; guidance, condition, attack warning • Operator input/control • Aiming; gun, camera (stabilization) • Industrial • Sensing: vibration, tilt, direction, rate • Stabilization • Monitoring • Robotics; position, contact, feedback, etc. ADI

13. Now owned by ADI INERTIAL Dual-Axis Gyroscope Resonant Accelerometers 3-Axis Accelerometer Z-Axis Gyroscope

14. ABS/Antiskid Airbag Deployment Anti-Rollover Detection Battery Disconnect Crash Alerting Dynamic Suspension Dynamic Ride Control Dynamic Cruise Control Electronic Park Brake Fleet Monitoring Fuel Shutoff Headlight Leveling Inertial Navigation – backup Misfire Detection Security/Antitheft Seatbelt Tensioning Stability Systems Tilt Sensing Tire Motion Tire Pressure Transmission Monitor Vehicle Performance Active Subwoofers Ambulatory Training Appliances Binoculars Blood Pressure Monitor Camcorders Stabilizer Digital Pens Digital Cameras Stabilizer Disk Drive Monitoring Game Controllers Handheld GPS Head Tracking Inertial Navigation Laptop Anti-Theft Laptop Drop Detection Joysticks Mouse - 3D Out-of-Balance Medical Devices Sleep Monitor Pedometers Sports Training – golf Sports Training – fly cast Sports Training – batting Tilt Sensing Virtual Reality I/O Wearable Computing I/O Accelerometer Applications Automotive Consumer Industrial/Scientific/Military • Antenna Alignment • Antenna Switches • Construction Leveling • Machine • Health Equipment • Tilt Sensing • Fork Lift Positioning • Marine Navigation • Platform Leveling • Seat Damping • Seismic • Gas Shutoff • Satellite Dish Alignment • Satellite Gyroscopes • Ship mechanical monitoring • Shock Sensing • UAVs • UMVs • Vibration Monitoring

15. Injector Pressure Sensor Fuel Pressure Sensor Automotive Pressure Sensors • Pressure Sensors • Fuel • Tire • Manifold • Injector • AC • Mass air • Break • Fuel vapor • Oil AC Pressure Sensor

16. Thin diaphragm Internal ref. pressure Vacuum Resonating beam (F1) Resonating beam is now under tension; (F2) Transducer Pressure Sensors • Transducers • Piezoresistor • Capacitor • Resonant beam

17. Reactive surface adsorbs gases i Heater Chem-sensor gate; adsorbing metal like Pd Adsorption lowers threshold voltage since a dipole is induced. Vs Vd Chem-FET Chemical Sensors Readily detects H2, CO, Alcohols, Hydrocarbons

18. Mechanical Transfer • Gears • Wheels • Levers • Rackets • Shuttles; walking beams • Hinge & lock • Articulated beams

19. Power Device Classes • Extractors using ambient energy • Converters:energy-1 energy-2 • Relays for power(not signal) • Power controllers(beyond relays) • Generators using fuel 1. Uses waste energy, 2. Uses generated energy

20. Power Extractors Typically utilize machine mechanical vibrations C1 Changing capacitor plate spacing generates power; reverse damper. C2 C2 an be replaced with a magnet. Machines produce mostly 1 KHz to 5 KHz vibrations

21. Power MEMS • Chemical fuel to: • Mechanical rotation, reciprocation, etc. • Fluid or gas pumping force • Electrical (fuel cell) • Thrust; rocket • Mechanical Electrical (turbo-generator) • Photonic to electrical(really just a converter) • Mechanical, electrical to chemical(battery) 10 to 100 watts 100 K to 1-million RPM

22. Gas Turbine

23. on off TI MOEMS: DLP on Over 8-million parts on on off on on Ref. “Digital Light Processing TM for High-Brightness, High-Resolution Applications” Larry J. Hornbeck, Ti.com

24. 1,400,000 mirrors in one module Texas Instruments DLPTM animation by kbg

25. Session Summary • Most MEMS are directly electrically powered • Electrostatic is simplest; very popular • Bimorph is ideal for no/low wear beams • Many kinds of mechanical transfer • Sensors will remain largest market • Reliability issues on some, but not all MEMS