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4200-SCS TRAINING COURSE

4200-SCS TRAINING COURSE. “DEVICE CHARACTERIZATION MADE EASY”. AGENDA. Part II ADVANCED MEASUREMENTS Making Stable Measurements Low Current Measurements Guarding and Shielding ADVANCED KITE Configuring Timing settings Optimizing speed versus noise

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4200-SCS TRAINING COURSE

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  1. 4200-SCS TRAINING COURSE “DEVICE CHARACTERIZATION MADE EASY”

  2. AGENDA • Part II • ADVANCED MEASUREMENTS • Making Stable Measurements • Low Current Measurements • Guarding and Shielding • ADVANCED KITE • Configuring Timing settings • Optimizing speed versus noise • Graphical and numeric data analysis • Managing KITE application files • Creating custom devices in KITE • KULT • Overview • Understanding KULT window • Creating /modifying KULT user modules • LPT library function overview • LPTlib – KITE interaction via UTM’s • KXCI overview • Overview • KXCI console Part I • OVERVIEW Introduction System Architecture Connections and Configuration • KCON – Configuration Utility Configuration Navigator Menus Overview 3. BASIC SOURCE-MEASURE CONCEPTS SMU source-measure configurations Sweep concepts Sourcing versus Sinking Local Sense versus Remote Sense 4. ESSENTIAL KITE KITE Overview Getting started Configuring ITMs Configuring UTMs Displaying Test Results Using Device and Test Libraries Executing Test Plans Creating a New Project

  3. Introduction • 4200-SCS is a powerful and versatile system for DC characterization of semiconductor devices and test structures • Combines fast and accurate SMUs, embedded Windows NT-based PC, and friendly Keithley Test Environment • This course will provide essential user skills to work with 4200-SCS • User Manual and Reference Manual can be found on every 4200-SCS desktop

  4. SYSTEM ARCHITECTURE

  5. CONNECTIONS AND CONFIGURATION • Use supplied 3-lug triaxial cables • Connect SMU Force to DUT HI • Connect SMU Common to DUT Common Shield and DUT LO • Connect SMU Guard to DUT Guard Shield

  6. CONNECTIONS AND CONFIGURATION (cont) • Example of 3-terminal connection • Ground Unit (GNDU) should be used for COMMON connections, whenever possible

  7. CONNECTIONS AND CONFIGURATION (cont) • Alternative connection possible using all Force terminals • Any of the SMUs can be programmed to serve as circuit COMMON • Use same connections on units with PreAmps

  8. CONNECTIONS AND CONFIGURATION (cont) • Example of switch matrix connection • Recommended cables: 4200-MTRX-X or 4200-TRX-X • Same connection scheme when using system with PreAmps • Recommended switch mainframes: KI 707(A), KI 708(A) • Recommended matrix cards: KI 7071, 7072, 7172, 7174A • Fully supported by KITE software

  9. CONNECTIONS AND CONFIGURATION (cont)Control and Data connections – rear panel view • Fan • Power receptacle • LAN (network) connector • Keyboard /mouse connector • IEEE-488 (GPIB) connector • Trigger link (not supported) • Interlock connector • Instrument slots 1 through 8 • Ground unit • Serial Port • Parallel Port • SVGA (video monitor) port

  10. CONNECTIONS AND CONFIGURATION (cont)Interlock connection • Without interlock, SMU output is limited to +/-20 V • Interlock will engage the 200V range • Use supplied interlock cable to connect to safety switch on test fixture or probe station dark box • Safety switch closes circuit between pins 1 and 2 of the interlock cable • Yellow Interlock LED on 4200-SCS front panel will be lit when interlock is engaged

  11. CONNECTIONS AND CONFIGURATION (cont)KCON Utility Overview • KCON is used to manage configuration of the internal 4200-SCS instruments (SMUs) and external system components • KCON supports switch matrices, CV analyzers, Pulse Generators, Probers, other GPIB instruments • KCON main window contains Configuration Navigator and KCON Work Area

  12. CONNECTIONS AND CONFIGURATION KCON Utility Overview (cont) • Click on any internal or external instrument in Navigator window to see its Properties • SMUs and PreAmps also have Self Test button on their Properties window • Self Test utility allows user to run internal hardware checks – report appears in Pass/Fail window

  13. CONNECTIONS AND CONFIGURATION KCON Utility Overview (cont) • Switch matrix card Properties window allows easy connections configuration • Rows are typically connected to instruments • Columns are typically connected to DUT • This configuration is referenced by KITE software to close matrix connections

  14. BASIC SOURCE-MEASURE CONCEPTSBasic SMU Block-diagram • A basic SMU is a voltage or current source (depending on chosen force function) in series with I-meter, and in parallel with V-meter • I-limit or V-limit circuitry allows to maintain compliance limits • Guard circuit follows the Force potential to prevent current leakage • Sense circuitry allows remote voltage sensing bypassing current-carrying Force circuit • Ground Unit provides full Kelvin connection to instrument COMMON, but does not have source-measure capability

  15. BASIC SOURCE-MEASURE CONCEPTSSource-Measure Configurations • Source I – Measure V configuration turns SMU into high-impedance CURRENT SOURCE • Current is limited by compliance setting • If I=0, SMU becomes VOLTMETER • Source V – Measure I configuration turns SMU into low-impedance VOLTAGE SOURCE • Voltage is limited by compliance setting • If V=0, SMU becomes AMMETER

  16. BASIC SOURCE-MEASURE CONCEPTSSourcing and Sinking – Operating Boundaries • SMUs can operate in four quadrants • Quadrants I and III are sourcing (I and V have same polarity) • Sourcing SMUs deliver power to load • Quadrants II and IV are sinking (I and V have different polarity) • Sinking SMUs dissipate power • Power boundaries of the SMUs are limited to 2 W (medium-power 4200-SMU) or 20 W (high-power 4210-SMU).

  17. BASIC SOURCE-MEASURE CONCEPTSLocal and Remote Sensing • Local sensing is done on high-impedance devices (above 1 kΩ) • SMU uses Force connections to make measurements • When current is high enough to generate voltage drop across cable, use remote sense • Remote sense allows to measure voltage directly across DUT, since current drop across sense lines is negligible

  18. BASIC SOURCE-MEASURE CONCEPTSUnderstanding Sweep • SDM (Source-Delay-Measure) cycle: • Set source output level • Wait for the source delay • Make the measurement • Delay and Measure times can be controlled from KITE • Three sweep types: Linear, Logarithmic, Custom • Each step (sweep point) is an SDM cycle • Additional timing variable in sweep – Hold Time (initial delay before sweep starts)

  19. ESSENTIAL KITEPower-up and log-on • Power-up: disconnect DUTs, stay clear of SMU output connectors / probes • Log-on: KIUSER (no password) or KIADMIN (password: KIADMIN1) • If KITE doesn’t load by default, use Windows START->PROGRAMS menu

  20. ESSENTIAL KITEOverview • KITE is the main software component and primary user interface for the 4200-SCS • KITE interface contains: • Menu area • Toolbar area • Site Navigator • Project Navigator • KITE workspace • Message area • Status bar

  21. ESSENTIAL KITEGetting started: “vds-id” test • In KITE, select: File -> Open Project • In the Open KITE Project File dialog, open Default folder, then click on default.kpr file, and click Open • Enable Project Navigator by selecting View -> Project Navigator • Open “vds-id” ITM by double-clicking it in the Project Navigator

  22. ESSENTIAL KITEGetting started: “vds-id” test • Make physical connections to the MOSFET using triax cables • Modify test definition: select different instrument for the Bulk terminal (GNDU-SMU4) • Modify force-measure settings for the Gate terminal (SMU3) – change stepping to 2.1-5.1 v • Display the “vds-id” graph (Graph tab) • Execute the “vds-id” test (Run button on the Toolbar) • View graph and data update real-time • Save results (Save button on the Toolbar) • Export the data (Sheet -> Save As…) • Export the graph (Graph -> right-click -> Save As…) • Modify force-measure settings for the Gate terminal (SMU3) back to 2-5 v • Execute the test using Append button • View new data appended to the old graph, and also on the Append1 sheet of the Data tab

  23. ESSENTIAL KITEIntroducing a User Test Module (UTM) • Add a new UTM to the 4terminal-n-fet Device Plan, give it a name • Open the UTM by double-clicking it in the Project Navigator • Under User Libraries, select KI42xxulib • Under User Modules, select Rdson42xx • Enter / modify user parameters • Save module • Execute the UTM by clicking the Run button • View the results in the Data tab • Create another UTM using the Matrixulib library and the ConnectPins module

  24. ESSENTIAL KITESequencing tests • Open the first four ITMs under 4-terminal MOSFET Device Plan in Default project • Select Window ->Tile from the Menu Area to view all four ITMs at once • Click on the Graph tab of each ITM to view all graphs simultaneously • In the Project Navigator, click on 4terminal-n-fet Device Plan • Click Run and watch the tests execute sequentially, per Device Plan • Execution can be aborted at any time • Change the execution sequence: open Device Plan window • Select a test and move it using Move Up or Move Down buttons • Click Apply to save changes to the Test Sequence Table • Same techniques apply to sequencing Device Plans within a Subsite, and Subsites within a Site • A Site plan can be executed multiple times (up to 999) • Multiple site execution settings can be modified by double-clicking on the project name in the Project Navigator

  25. ESSENTIAL KITECreating a new project • In KITE, select File -> New Project. A “Define New Project” window will open • Name the project (up to 260 characters including directory path, no spaces) • Specify location (or accept default location C:\S4200\kiuser\Projects\) • Specify number of sites (up to 999) • Turn ON or OFF the Project Plan Initialization and Termination Steps, click OK to accept • Insert new Subsite Plan(s) • Insert new Device Plan(s) – from a toolbar menu, or using Device Library • To use Device Library, double-click on the Subsite Plan, then use Copy and Submit buttons • To use Test Library, double-click on the Device Plan, then use Copy and Submit buttons • When submitting two identical tests to the same project, they are assigned unique ID’s (UID) • When done building project, select File -> Save All • To create a copy of the project under a different name, select File -> Save Project As…

  26. ADVANCED MEASUREMENT TECHNIQUESMaking Stable Measurements Single SMU stability considerations • Current source instability may be caused by driving large inductive loads, but is very rare • Voltage source instability may be caused by driving large capacitive loads on low current measurement ranges Multiple SMU stability considerations • Two categories: high-frequency (100kHz – 200MHz) and low-frequency (below 100kHz)

  27. ADVANCED MEASUREMENT TECHNIQUESLow Current Measurements Leakage currents can be prevented by: • Using good quality insulation in cables, test fixtures, and probe cards (Teflon, polyethylene, ceramics) • Reducing humidity to <50% RH • Cleaning insulator surface from contaminants (skin oils and salts, solder flux, etc.) • Signal guarding

  28. ADVANCED MEASUREMENT TECHNIQUESLow Current Measurements • Generated currents • Offset currents • Triboelectric effects • Piezoelectric and stored charge effects • Dielectric absorption

  29. ADVANCED MEASUREMENT TECHNIQUESLow Current Measurements Voltage burden Source impedance Cable capacitance Interference • Electrostatic interference • RF interference Ground loops

  30. ADVANCED KITEConfiguring Speed and Timing Settings

  31. ADVANCED KITEGraphical and Numeric Data Analysis

  32. ADVANCED KITEGraphical and Numeric Data Analysis

  33. ADVANCED KITEManaging KITE Application Files and Test Results

  34. ADVANCED KITECreating Custom Devices in KITE

  35. KULT – Keithley User Library ToolOverview • The Keithley User Library Tool (KULT) is a tool used to create and manage user libraries. • A user library is a collection of one or more user modules. • User modules are C programming language subroutines (or functions). • User libraries are created to control instrumentation, analyze data, or perform any other system automation task programmatically. • Once a user library has been built using KULT, its modules can be executed in KITE as User Test Modules (UTMs). • KULT interface allows users to enter code, compile the module, build (link) the library. It also has such user-library management features as Copy Module, Copy Library, Delete Module, and Delete Library. • KITE dynamically loads the user module and the appropriate user library. • KITE passes the user-module parameters to the user module for execution. • Once module is executed, data is returned to KITE for interactive analysis and plotting.

  36. KULT – Keithley User Library ToolUnderstanding the KULT Window

  37. KULT – Keithley User Library ToolCreating a KULT user module • Open KULT window • Name a new user library • Name a new user module • Enter the function (module) return type • Enter the source code • Enter parameters • Enter / check header files • Document the module in the Description area • Save, compile, and build the module • Find compile / build errors and debug the code • Open KITE, create / name a new User Test Module (UTM) • Configure the new UTM by selecting the user library and user module • Enter user parameter value(s) • Save the module • Execute the module in KITE – view results

  38. KULT – Keithley User Library ToolLPT Library Overview • The Keithley Linear Parametric Test Library (LPTlib) is a high-speed data acquisition and instrument control software library. It is the programmer’s lowest level of command interface to the system’s instrumentation. • By default, KULT automatically enters the keithley.h header file into the Includes tab area. This header file includes all the necessary header files that allow linking to the LPT libraries. • All LPTlib functions are case sensitive and must be entered as lower case when writing program codes. • The LPTlib includes the following groups of functions: • Instrument control • Matrix control • SMU ranging • SMU sourcing • SMU measuring • Combination • Timing • GPIB • RS232 • General • Execution • Arithmetic

  39. KXCI – Keithley External Control InterfaceOverview

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