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ITRS 2007 Environment, Safety and Health Chapter

ITRS 2007 Environment, Safety and Health Chapter. December 5, 2007. Jim Jewett. OUTLINE. Participants Key Themes for 2007 ESH Strategies Reorganized Tables Table Revisions Supplemental Tools. James Beasley – ISMI Laurie Beu - Env Policy, Strategy & Mgmt, LLC Aimee Bordeaux - SEMI

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ITRS 2007 Environment, Safety and Health Chapter

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  1. ITRS 2007 Environment, Safety and Health Chapter December 5, 2007 Jim Jewett

  2. OUTLINE • Participants • Key Themes for 2007 • ESH Strategies • Reorganized Tables • Table Revisions • Supplemental Tools

  3. James Beasley – ISMI Laurie Beu - Env Policy, Strategy & Mgmt, LLC Aimee Bordeaux - SEMI Reed Content – AMD Tom Diamond - IBM Hans Peter Bipp – Infineon* John Harland – Intel Shane Harte - ESIA David Harman – Intel Bob Helms – University of Texas Stan Hughes – Applied Materials Shigehito Ibuka – TEL Francesca Illuzi – ST Microelectronics* Jim Jewett – Intel* Bruce Klafter – Applied Materials Joey Lu – TSIA* Joseph K.C. Mau – Powerchip Semiconductor Ed McCarthy - Freescale Semiconductor Laura Mendicino - Freescale Semiconductor Mike Mocella - DuPont Phil Naughton – ISMI Takayuki Ohgoshi – NEC Electronics* Brian Raley - AMD Farhang Shadman – U of AZ Mike Sherman – FSI International Jeffrey Sczechowski – ST Microelectronics Harry Thewissen – NXP Semiconductors Tetsu Tomine – Seiko-Epson* Tim Wooldridge - SRC Walter Worth – Sematech* Munetsugu Yamanaka – TEL Tim Yeakley – Texas Instruments 2007 ESH Participants *Bold Type = ITWG Members

  4. ESH Key Themes for 2007 • Focus on critical chemistry/materials needs • Improvement of energy efficiency • “ECO” design of factories and products

  5. Underlying Strategies Built Into 2007 ESH Chapter • Understand (characterize) processes and materials to create a development baseline; • Use materials that are less hazardous or whose byproducts are less hazardous; • Design products and systems (equipment and facilities) that consume less raw material and resources; • Make the factory safe for employees.

  6. Reorganized Tables • Chemical/Materials Tables focus on chemical selection • Process Tables focus on process and tool design • Facilities Table (new) focus on support systems and fab level design • Design for Sustainability & Product Stewardship • Intrinsic ESH Requirements

  7. Chemicals and Materials Management Technology Requirements

  8. Process and Equipment Technology Requirements Establish chemical utilization and process byproducts baseline Maintain or improve chemical utilization* by 10%; characterize process emissions and byproducts

  9. Facilities Technology Requirements Design facilities to minimize environmental footprint and impact

  10. Sustainability and Product Stewardship Technology

  11. Chemical Restrictions Screen

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