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SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity

SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity. Revision Plans for SEMI E10 / E35 / E58 / E79 / E116 / E124 David L. Bouldin Texas Instruments Incorporated d-bouldin@ti.com. Revision Plans for SEMI E10.

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SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity

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  1. SEMICON West 2006 STEPMethods to Measure/Improve Equipment Productivity Revision Plans for SEMI E10 / E35 / E58 / E79 / E116 / E124 David L. Bouldin Texas Instruments Incorporated d-bouldin@ti.com

  2. Revision Plans for SEMI E10 SEMI E10-0304ESpecification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) • E10 Revision Task Force (TF) working on revision to: • Convert the multi-path cluster tool RAM metrics into official E10 metrics vs. supplementary ones. • Harmonize terminology between E10 and E79. • Plan to Yellow Ballot during Spring 2007 cycle. SEMICON West 2006 STEP

  3. Revision Plans for SEMI E35 SEMI E35-0305 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment • Equipment COO TF working on revision to: • Add new content on how to handle calculating COO for measurement, inspection, and test equipment. • Add more inputs/guidance related to environmental, health, and safety (EHS) cost elements. • Plan to Yellow Ballot during Fall 2006 cycle. SEMICON West 2006 STEP

  4. Revision Plans for SEMI E58 SEMI E58-0703Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and ServicesandSEMI E58.1-0697 (Reapproved 0703)SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services • No active TF currently working on revision. • Due for mandatory 5-year review in 2008. SEMICON West 2006 STEP

  5. Revision Plans for SEMI E79 SEMI E79-0304Specification for Definition and Measurement of Equipment Productivity • Equipment Productivity Metrics TF revising to: • Redefine “virtual machines” with reference to fundamental quantities: theoretical production time, equipment uptime, and total time, but without changing calculation results. • Harmonize terminology between E10 and E79. • Make significant editorial changes for clarity and consistency. • Yellow Balloted during SEMICON 2006 cycle. SEMICON West 2006 STEP

  6. Revision Plans for SEMI E116 SEMI E116-0706 Provisional Specification for Equipment Performance TrackingandSEMI E116.1-0706Specification for SECS-II Protocol for Equipment Performance Tracking • TF completed original standards in 2002 and 2003. • TF completed latest revisions in early 2006 and discharged. • Due for mandatory 5-year review in 2011. SEMICON West 2006 STEP

  7. Revision Plans for SEMI E124 SEMI E124-1103Provisional Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics • No active TF currently working on revision, but plan to reactivate Factory Productivity Metrics TF to: • Remove Provisional status. • Harmonize terminology with E10 and E79. • Due for mandatory 5-year review in 2008. SEMICON West 2006 STEP

  8. Legend C Chair/Co-Chair L Leader TF Task Force SE Standards Engineer TA Technical Architect TE Technical Editor SC Subcommittee VC Vice Chair NA METRICS COMMITTEE (SC129) C: David Bouldin – TIC: Tom Pomorski – Brooks Automation C: TBD TE: Carolyn Busing – Self TA: TBD SE: Susan Turner– SEMI ESD/ESC TF L: Arnold Steinman – Ion Systems Factory Level Prod. Metrics TF (Inactive) E10 Revision TF Equipment Documentation TF Metrics Education/Adoption SC RF Diagnostics TF Equipment Productivity Metrics TF EMC TF Film Mechanical Testing TF L: David Bouldin – TI L:Kevin Lanham – TEL L: Tom Pomorski – Brooks Automation L: Lisa Pivin – Intel L: John Pace – Si Automation L: John Caughman – ORNL L: Jeff Lexa – Bird L: Sal DiIorio – Semi-Tech Group L: Michael Werre – Intel L: Ron Billings – FABQ/ Ga. Tech. L: Jim Irwin – Irwin Consulting L: Tom Pomorski – Brooks Automation L: Andrew McKerrow – TI L: TBD L: Vladimir Kratz – Credence L: Mark Frankfurth – Cymer Equipment COO TF Measurement Systems Analysis TF International Environmental Contamination Control TF L: TBD L: TBD L: Daren Dance – WWK L: David Bouldin – TI L: Jürgen Frickinger– Fraunhofer-IISB L: Mikio Furukawa – Shin-Etsu Polymer L: Rob Henderson – Yield Service Int’l SEMI NA Metrics Technical Committee E35 STEPs E10 E79 E124 SEMICON West 2006 STEP

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