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Applications of Micro Electro Mechanical Systems (MEMS)

Applications of Micro Electro Mechanical Systems (MEMS). Jobin Philip. Introduction . IC invention Large number of transistors on single silicon chip Interconnected to functional circuits. Micro-fabricated Membrane Mirrors. 12 mm in diameter Less than 1um in thickness.

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Applications of Micro Electro Mechanical Systems (MEMS)

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  1. Applications of Micro Electro Mechanical Systems(MEMS) Jobin Philip

  2. Introduction • IC invention • Large number of transistors on single silicon chip • Interconnected to functional circuits

  3. Micro-fabricated Membrane Mirrors • 12 mm in diameter • Less than 1um in thickness

  4. Micro-fabricated Membrane Mirrors • Optical Switching • High optical efficiency • Good potential for aberrations correction • Coupling efficiency of 3000 interconnections

  5. Micro-fabricated Membrane Mirrors

  6. Two Axis Micro-mirror

  7. Micro-Mirror

  8. Micro-Mirror

  9. Optical Switch

  10. 2x2 Optical Switch Cross State Bar State

  11. Optical Switch

  12. NxN Optical Link

  13. Agilent Bubble Switch

  14. Segmented Mirrors • Space Optical Telecommunication • Reliable, Small in size, Light in weight, & Easy to fabricate • Air Turbulence causes optical aberrations • Quick response time, therefore able correct optical aberrations

  15. Segmented Micro-Mirrors

  16. Segmented Micro-Mirrors

  17. Down ribbons Incident Diffracted Diffracted Incident Reflected Up ribbons 1/4 l Ribbons Oth Mode +1st Mode +3rd Mode Grating Light Valve (GLV) Silicon Light Machines: http://www.siliconlight.com

  18. Prism Lens GLV Focal Plane Screen Color Wheel Optical Input GLV Projection System • Digital Projection System using Grating Light Valve • If pixel is “off”, light is reflected straight off GVL into the absorbing screen • If pixel is “on”, light is diffracted at an angle, propagating through the lens to the focal plane

  19. Next Generation Projectors

  20. Question…???

  21. Optical Switch

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