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Detailed Placement for Improved Depth of Focus and CD Control

Detailed Placement for Improved Depth of Focus and CD Control. Puneet Gupta 1 Andrew B. Kahng 1,2 Chul-Hong Park 2 (chpark@vlsicad.ucsd.edu). http://vlsicad.ucsd.edu. 1 Blaze DFM, Inc. 2 ECE Department, University of California, San Diego. Outline. OPC and SRAF: An Introduction

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Detailed Placement for Improved Depth of Focus and CD Control