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Epitaxy & oxidation (with wafer cleaning)

Epitaxy & oxidation (with wafer cleaning). sami.franssila@aalto.fi. Homoepitaxy: crystalline film A on top a crystalline wafer A. Single crystal wafer. Epitaxial layer of the same material deposited on top. CVD epitaxy of silicon. SiH 2 Cl 2 (g) ==> Si (s) + 2 HCl (g), T = 1150 o C

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Epitaxy &amp; oxidation (with wafer cleaning)

Epitaxy & oxidation (with wafer cleaning)