'Ion beam lithography' diaporamas de présentation

X-ray lithography (XRL)

X-ray lithography (XRL). Overview and resolution limit. X-ray source ( electron impact and synchrotron radiation). X-ray absorption and scattering. X-ray lithography resist (PMMA and SU-8). X-ray lithography mask (absorber on membrane). LIGA process (for high aspect ratio metal structure).

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Photolithography

Photolithography. D. Boolchandani Department of ECE Malaviya National Institute of Technology Jaipur. Photolithography. In a microelectronic circuit, all the circuit elements (resistors, diodes, transistors, etc.) are formed in the top surface of a wafer (usually silicon).

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Nanotechnology : Emerging Tool for Diagnostics and Therapeutics

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PETROZAVODSK STATE UNIVERSITY

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