Lubricant on steel measurement

1. Thin Film Measurement solution Software, sensors, custom development and integration LUBRICANT ON STEEL MEASUREMENT I. SUMMARY Steel sample with lubricated surface was measured using MProbeVis-Micro with 40um measurement spot size. Measurements were done at 3 points. Dispersion of the lubricant was represented using Cauchy approximation assuming R.I. ~ 1.43. Steel dispersion was represented using standard library material. Surface of the steel has some roughness/grains that caused light scattering. Effective roughness was determined from the measurement. The results of the measurements are summarized in the Table I. Measurement point (of lubricant) 1. (left side) 77 2. (right side) 129 3. (center) 147 Table 1. Results of the lubricant thickness measurement Thickness, nm Effective roughness, nm 24 34 43 Fig. 1 Measured reflectance spectra at 3 points. 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

2. Point # 3 Point#1 Point #2 Fig. 2 Measurement points location II. DETAILS Fig. 3 Point #1 measurement vs. model fit. Measured parameters: layer thickness and surface roughness 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

3. Fig. 4 Point #2 measurement vs. model fit. Measured parameters: layer thickness and surface roughness Fig. 5 Point #3 measurement vs. model fit. Measured parameters: layer thickness and surface roughness 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

4. Fig.6 Lubricant dispersion represented using Cauchy approximation 83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com