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Free-Space Communication for Autonomous Sensors using Grating Light Modulators

Free-Space Communication for Autonomous Sensors using Grating Light Modulators. David R. Pedersen, Michael H. Guddal University of California, Davis Olav Solgaard Stanford University. Outline. Summary of Year 1 Milestones Developed, modeled and characterized GLM

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Free-Space Communication for Autonomous Sensors using Grating Light Modulators

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  1. Free-Space Communication for Autonomous Sensors using Grating Light Modulators David R. Pedersen, Michael H. Guddal University of California, Davis Olav Solgaard Stanford University

  2. Outline • Summary of Year 1 Milestones • Developed, modeled and characterized GLM • Demonstrated free-space optical link using GCC modulator • Improvements in GLM design • Reduce angle dependence and dispersion • Increase damping • No interference with plasma => “buried” GLM • Year 2 Milestones • Integrate micromachined GLM with on-board power • Buried GLM, through-the-wafer interconnects, wafer bonding

  3. GCC Communication Link

  4. High Contrast GLM Reduced Angle dependence Reflective State Diffractive State Increased damping

  5. Full-wafer Grating Light Modulators Period: 10 Gap: 10um Beam Width: 10um Substrate/Beam Spacing: 2um Beam Length: 200um to 600um Beams: Doped low stress polysilicon Insulating Material: PSG

  6. Lay out Each line: 2mm open-circuit region etched to the substrate and aligned with the front Front Backside contact to the substrate Back

  7. Buried Grating Light Modulators - Technology Development DRIE trenches for interconnects and corner-cube reflectors Oxidation-smoothed TIR surface AR-coating GLM aperture

  8. Autonomous Sensor Wafer with Buried GLMs

  9. Conclusion • Met Year 1 Milestones: • Fabricated and tested micro-machined GLMs • Demonstrated free-space communication • Full-wafer fabrication process • Year 2 Milestones • Integrate micromachined GLMs with on-board power, sensors, and electronics sources • Technology development • Buried GLMs • Through-the-wafer interconnects • Wafer bonding

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