A Monolithic CMOS Microhotplate-Based Gas Sensor System

1. A Monolithic CMOS Microhotplate-Based Gas Sensor System Muhammad Y. Afridi John S. Suehle Mona E. Zaghloul David W. Berning Allen R. Hefner Elliott Cooper-Balis

2. MEMS Overview The integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology

3. Gas Sensor Motivations • Use existing CMOS technology • Low power • Low cost • Reliable detection • Applications : • Detection of harmful substances in public places • Detection of freshness of food • Detection of toxic leaks in manufacturing facilities

4. Microhotplate Gas Sensor • Key Features : • Suspended trampoline structure • Polysilicon resistor heating element (2-kΩ) • Metal-oxide film-based sensing element (Tin or Titanium)

5. Microhotplate Gas Sensor

6. Gas Sensor System

7. Gas Sensor System

8. Gas Sensor System

9. Gas Sensor System

10. Gas Sensor System

11. Thank You!