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Capacitive-Resistive Spacers by ALD

Capacitive-Resistive Spacers by ALD. Jeffrey Elam, Qing Peng, Anil Mane, Joe Libera Argonne National Laboratory May 4, 2010. Capacitive-Resistive Spacers. Spacers. C and R are provided by spacers between detector elements. ALD spacers.

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Capacitive-Resistive Spacers by ALD

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  1. Capacitive-Resistive Spacers by ALD Jeffrey Elam, Qing Peng, Anil Mane, Joe Libera Argonne National Laboratory May 4, 2010

  2. Capacitive-Resistive Spacers Spacers C and R are provided by spacers between detector elements

  3. ALD spacers Use Incom capillary array as substrate for ALD – high surface area to achieve high capacitance D=5 mm (e.g.) start with small disc of Incom array

  4. ALD to For Capacitance and Resistance 1. Substrate 2. ALD metal 3. Protect 4. ALD insulator 5. ALD metal 6. Unprotect 7. Electrodes 8. Resistive coating

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