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ALD Update. Aileen O’Mahony, Anil Mane, Jeff Elam 1/21/2014. As-ground MCPs . 17 as-ground wax free MCPs coated in single batch using a MCP holder fabricated by UCB. (Many thanks to UCB team)
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ALD Update Aileen O’Mahony, Anil Mane, Jeff Elam 1/21/2014
As-ground MCPs • 17 as-ground wax free MCPs coated in single batch using a MCP holder fabricated by UCB. (Many thanks to UCB team) • These had degased for 3days @ UCB. MCPs splits into ALO passivated (20nm) and non passivated Outlet Precursor inlet Precursor flow
As-ground MCPs • 17 as-ground MCPs coated in one batch • MCPs are sent to UCB for testing, • 4 pairs will be back to UoC (Matt for Cs study)
Grid Spacers • 8”x8” mm grid spacer coated with Chem1 (for Andrey). Annealed at 400C in Beneq • After R measurements • 6 cm grid spacers to be coated once R measured (for Bob) • More 8” 2mm GS will be coated