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Modal Analysis of Micromechanical Gyroscope FE Model

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  1. Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element 3D model

  2. Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element 3D FE model NE = 3328NDF = 88416

  3. y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element First natural mode Second natural mode F1 F2

  4. y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Displacements Ux Ux

  5. y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Displacements Uy Uy

  6. y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Displacements Uz Uz

  7. Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Influence of deformed state arising at sensitive element manufacturing on a spectrum of natural frequencies

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