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Developing Th in F ilms U sing a V acuum E vaporation S ystem and M easurements

MEMD Group – memd.cankaya.edu.tr. Developing Th in F ilms U sing a V acuum E vaporation S ystem and M easurements. Student Team: Sedef ÇALIŞKAN Zeynep KORKMAZ Supervisors: Prof. Dr. Ziya Burhanettin GÜVENÇ Prof. Dr. Celal Zaim ÇİL Yrd. Doç. Dr. Göknur CAMBAZ BÜKE.

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Developing Th in F ilms U sing a V acuum E vaporation S ystem and M easurements

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  1. MEMD Group – memd.cankaya.edu.tr Developing Thin Films Using a Vacuum Evaporation System and Measurements Student Team:Sedef ÇALIŞKANZeynep KORKMAZSupervisors:Prof. Dr. Ziya Burhanettin GÜVENÇProf. Dr. Celal Zaim ÇİLYrd. Doç. Dr. Göknur CAMBAZ BÜKE

  2. MEMD Group – memd.cankaya.edu.tr Outline • Aim of the project • PVD System • Methodology to be followed

  3. MEMD Group – memd.cankaya.edu.tr Aim To study the electrical and optical properties of thin films produced by using physical vapor deposition (PVD) system.

  4. MEMD Group – memd.cankaya.edu.tr Thin Film Technology • Layer of material ranging from nanometer (monolayer) to several micrometers in thickness.  • Main applications: Electronic devices and optical coatings 1. Flexible Solar Cell 2. OLED 3. Transistor 1. http://gotpowered.com/2011/ge-develops-thin-film-photovoltaic-panels/ 2. http://pinktentacle.com/2007/05/flexible-full-color-organic-el-display/ 3. http://www.sciencecodex.com/silicon_spin_transistors_heat_up_and_spins_last_longer

  5. MEMD Group – memd.cankaya.edu.tr Deposition Technologies • Chemical Reaction • CVD • Electrodepositon • Epitaxy • Thermal oxidation • Physical Reaction • PVD • Evaporating • Sputtering • Casting Substrate Deposition source

  6. MEMD Group – memd.cankaya.edu.tr Why PVD? • PVD processes are environmentally friendly • Costeffective • Suitable for electricaldevices • Low process temperatures (with the help of pressure) • Lower process risk

  7. MEMD Group – memd.cankaya.edu.tr PVD Technology • Sources are heated to their melting points • Evaporated molecules freely move in the chamber • Atoms condense on substrate

  8. MEMD Group – memd.cankaya.edu.tr Substrate Parameters • Process Parameters • Current • Time • Pressure • Material Selection • Substrate • Source Thin film Power Supply

  9. MEMD Group – memd.cankaya.edu.tr Our PVD System from VAKSİS • High technology company • Designing and manufacturing • Vacuum system • Vacuum component • Vacuum coating system

  10. MEMD Group – memd.cankaya.edu.tr Our PVD System from VAKSİS 1 Torr = 1 mm Hg 1 mm Hg = 133.3 Pa http://microlab.berkeley.edu/labmanual/chap6/vacuum.pdf

  11. MEMD Group – memd.cankaya.edu.tr Characterization • Electrical • Optical • Structural - microstructure

  12. MEMD Group – memd.cankaya.edu.tr Summary of the Methodology Determination of the starting parameters of PVD (P, T, t, substrate, target) Deposition of the Thin Film by PVD Electrical – Optical - Structural Characterization of these thin films Studying the effect of process parameters Optimization Simple Device Fabrication and tests

  13. MEMD Group – memd.cankaya.edu.tr Near Future Plan • Material Selection • Ordering PVD System (available in two months) • Studying electrical and optical characterization methods • Design of the characterization set-up

  14. MEMD Group – memd.cankaya.edu.tr Thank You for Listening

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