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CERN- Bonding

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CERN- Bonding. A.Pezous CERN , 13.03.2013. Design. 2 “NA62 frame” 2 “ATLAS” 8 “explosions” 10 “micro-chevron”. Process flow. Results - after etching. #3-split 1(no KOH). Avant recuit Après recuit. #5- split2: KOH. Avant recuit Après recuit. #8-split3: ouverture avant bonding.

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CERN- Bonding

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  1. CERN- Bonding A.PezousCERN, 13.03.2013

  2. Design • 2 “NA62 frame” • 2 “ATLAS” • 8 “explosions” • 10 “micro-chevron”

  3. Process flow

  4. Results- afteretching

  5. #3-split 1(no KOH) • Avant recuit • Après recuit

  6. #5- split2: KOH • Avant recuit • Après recuit

  7. #8-split3: ouverture avant bonding • Avant recuit • Après recuit

  8. #9-split4: ouverture avant bonding et LTFB

  9. #4- cross-section • Après recuit @1050°C • Après amincissement

  10. Thank you for your attention!

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