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Enhancing UV Treatment for Zinc-Tin Acetate Precursors in Thin-Film Applications

This study investigates the effects of UV treatment on the mobility improvement of zinc-tin acetate precursors, specifically exploring various concentrations of tin tert-butoxide and zinc acetate. Despite several modifications, no significant mobility improvements were observed. Optimal conditions included a 300°C annealing process, resulting in enhanced source-drain characteristics. Future work will focus on recalibrating acetate layer thickness and developing clear solutions for Sn and In acetates, aimed at advancing indium-based IZO thin-film transistors.

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Enhancing UV Treatment for Zinc-Tin Acetate Precursors in Thin-Film Applications

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  1. UV-treatment 0.033M Tin tert-butoxide No mobility improvement 0.15M Zinc acetate 0.2M Zinc acetate UV 5min

  2. Precursor ratio 0.2MZinc acetate 0.03M Tin tert-butoxide 0.035M Tin tert-butoxide 0.04M Tin tert-butoxide 0.25MZinc acetate 0.035M Tin tert-butoxide 0.04M Tin tert-butoxide

  3. Precursor ratio 0.2MZinc acetate:Tin(IV) acetate = 4:1 0.03M Tin tert-butoxide 0.035M Tin tert-butoxide 0.04M Tin tert-butoxide 0.15MZinc acetate:Tin(IV) acetate = 4:1 0.03M Tin tert-butoxide 0.035M Tin tert-butoxide 0.04M Tin tert-butoxide

  4. Best data 0.15MZinc acetate:Tin(IV) acetate = 4:1 0.035M Tin tert-butoxide 300°C, 3hr Annealing Improved S.S. Vth ~ 0 Increased IOff

  5. 0.3MTin tert-butoxide 5:10.15MZinc:Tin (Acetate) 4:10.15MZinc:Tin (Acetate) 3:10.15MZinc:Tin (Acetate) 0.35MTin tert-butoxide 5:10.15MZinc:Tin (Acetate) 4:10.15MZinc:Tin (Acetate) 3:10.15MZinc:Tin (Acetate)

  6. 0.4MTin tert-butoxide 5:10.15MZinc:Tin (Acetate) 4:10.15MZinc:Tin (Acetate) 3:10.15MZinc:Tin (Acetate) 0.3MTin tert-butoxide 0.2M Zinc acetate

  7. 0.33MTin tert-butoxide 0.2M 5% Tin Acetate 0.2M10% Tin Acetate 0.2M15% Tin Acetate 0.35MTin tert-butoxide 0.2M 5% Tin Acetate 0.2M10% Tin Acetate

  8. 0.33MTin tert-butoxide 0.2M 5% Indium Acetate 0.2M10% Indium Acetate 0.2M15% Indium Acetate 0.35MTin tert-butoxide 0.2M 5% Indium Acetate 0.2M10% Indium Acetate

  9. Future work • Re-calibration of acetate layer thickness • Making clear solution of Sn acetate & In acetate • Indium-based IZO TFT

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